File:P28 dipole leaf image fading.png
No higher resolution available.
P28_dipole_leaf_image_fading.png (481 × 289 pixels, file size: 18 KB, MIME type: image/png)
 | This is a file from the Wikimedia Commons. Information from its description page there is shown below. Commons is a freely licensed media file repository. You can help. |
Summary
| Description |
English: The images from small angle illumination and large angle illumination are different in the EUV reflective optical system, leading to different image positions as well as intensities. When combined, the image contrast is reduced.[1] This example is for 28 nm horizontal line pitch on a 0.33NA EUV system, with dipole leaf illumination. |
| Date | |
| Source | Own work |
| Author | Guiding light |
Licensing
I, the copyright holder of this work, hereby publish it under the following license:
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
References
- ↑ M. Burkhardt, Proc. SPIE 10143, 1041312 (2017).
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 13:21, 21 January 2023 | | 481 × 289 (18 KB) | Guiding light | Uploaded own work with UploadWizard |
File usage
The following pages on the English Wikipedia use this file (pages on other projects are not listed):
Global file usage
The following other wikis use this file:
- Usage on ru.wikipedia.org
