File:High-NA EUV forbidden illumination combinations.png

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High-NA_EUV_forbidden_illumination_combinations.png ‎(387 × 354 pixels, file size: 30 KB, MIME type: image/png)

Summary

Description
English: The dots represent illumination angles that can be used for a tight pitch, while the red dots are forbidden to be used certain combinations of larger pitches, due to the interaction with the central obscuration (pink).[1][2]
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Source Own work
Author Guiding light

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References

  1. ↑ Pitches Forbidden by the Central Obscuration in High-NA EUV Lithography
  2. ↑ Obstruction-Induced Pitch Incompatibilities in High-NA EUV Lithography

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13 June 2022

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current04:10, 13 June 2022Thumbnail for version as of 04:10, 13 June 2022387 × 354 (30 KB)Guiding lightUploaded own work with UploadWizard
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