File:EUV Stochastic Hot Spots.png

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EUV_Stochastic_Hot_Spots.png(309 × 289 pixels, file size: 42 KB, MIME type: image/png)

Summary

Description
English: Hot spots for stochastic defects are indicated where the small blue specks tend to collect. These indicate areas where there are stochastic absorbed dose variations close to the threshold level to print.[1]
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Author Guiding light

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Reference

  1. Hot Spots for Stochastic Defects in EUV Lithography

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9 April 2022

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current08:50, 9 April 2022Thumbnail for version as of 08:50, 9 April 2022309 × 289 (42 KB)Guiding lightUploaded own work with UploadWizard
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