File:Secondary electron blur vs dose.png
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Summary
DescriptionSecondary electron blur vs dose.png | The secondary electron blur can increase signficantly with increasing dose. References.: (Secondary electron blur) P. de Schepper et al., Proc. SPIE 9425, 942507 (2015); (Resist loss) A. Narasimhan et al., "Mechanisms of EUV Exposure: Internal Excitation and Electron Blur", EUV Symposium 6/16/2016, p.11. |
Date | |
Source | Excel |
Author | Guiding light |
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Date/Time | Dimensions | User | Comment |
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2019-03-09 13:49:38 | 480 × 305 | Guiding light | |
2019-03-09 09:42:19 | 480 × 290 | Guiding light | |
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 15:59, 2 April 2020 | 480 × 305 (9 KB) | Hippymoose17 | Transferred from en.wikipedia (MTC!) (1.1.0) |
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Horizontal resolution | 56.69 dpc |
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Vertical resolution | 56.69 dpc |