File:SAQP with selective SADP blocking.png

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Description
English: SAQP combined with selective SADP blocking is an example of the crossed multiple patterning combined with self-aligned blocking, described by TEL and w:Mentor Graphics,[1][2][3][4][5] as well as Coventor and IMEC.[6] Negative spacers[7] are also assumed here.
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Author Guiding light

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2018-09-30 11:22:09 727 × 1190 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
  1. ↑ US Patent 9240329
  2. ↑ US Patent application 20170221902
  3. ↑ N. Mohanty et al., Proc. SPIE 10147, 1014704 (2017).
  4. ↑ R. K. Ali, A. H. Fatehy, and J. Word, Proc. SPIE 10588, 105880Q (2018).
  5. ↑ A. H. Fatehy, R. Kotb, and J. Word, Proc. SPIE 10588, 105880P (2018).
  6. ↑ B. Vincent et al., Proc. SPIE 10583, 105830W (2018).
  7. ↑ A. Carlson and T-J. K. Liu, Proc. SPIE 6924, 69240B (2008).

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current16:23, 20 August 2019Thumbnail for version as of 16:23, 20 August 2019727 × 1,190 (17 KB)Dave louis johnTransferred from en.wikipedia (MTC!) (1.1.0)
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