File:Reflectivity angular spectrum at different wavelengths.png

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Summary

Description
English:
When only a narrow range of EUV wavelengths is considered (e.g., above center), it may give a false appearance of reflectance uniformity across angles.
The measured EUV multilayer reflectance is shown above as a function of incident angle for 13.3-13.7 nm wavelength range.[1] ASML's NXE EUV tool's broadband spectrum reflectance is also shown as the dashed curve.[2] The incident angle is defined with respect to the normal to the multilayer surface. The EUV source output is mostly concentrated between 13.3 nm and 13.7 nm.[3] The reflectance integrated over the range of angles is also comparable for the wavelengths of this range, but the dropoff for larger angles is faster for the longer wavelengths.[1] This trend is expected from the condition of Bragg's law.[4][5] A change in the cosine of the incident angle on the order of 1/(# of layer periods) ~2-3% is sufficient to reduce the wavelength's reflectance significantly.[6][7]
Inset: the impact of the angular dependence of reflectance on the wavelength distribution in the pupil, also known as apodization. The longest wavelengths are brighter at smaller angles, while the shortest wavelengths are brighter at larger angles. [8]
Multilayer reflectance in wavelength-angle space. The multilayer reflectance is maximized at the greenish region, falling off gradually in both angle and wavelength (in nm).
Date
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Author Guiding light
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References

  1. ↑ a b http://www.eecs.berkeley.edu/Pubs/TechRpts/2013/EECS-2013-56.html R. Chao et al., Measurement and characterization of EUV mask performance at high-NA, EECS Department, Univ. of California, Berkeley Technical Report No. UCB/EECS-2013-56, 5/10/2013, Figure 5.
  2. ↑ N. Davydova et al., Proc. SPIE 8352, 835208 (2012).
  3. ↑ I. Fomenkov et al., Adv. Opt. Techn. 6, 173 (2017).
  4. ↑ F. Scholze et al., Proc. SPIE 6151, 615137 (2006).
  5. ↑ The Very Different Wavelengths of EUV Lithography
  6. ↑ D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications, Cambridge University Press, 2000, Ch. 5.
  7. ↑ B. E. A. Salah and M. C. Teich, Fundamentals of Photonics, Wiley, 1991, p. 805ff.
  8. ↑ J. Ruoff, Proc. SPIE 7823, 78231N (2010).

Captions

Multilayer reflectance of EUV light at different wavelengths, as a function of incident angle.

Items portrayed in this file

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12 May 2019

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Date/TimeThumbnailDimensionsUserComment
current12:25, 20 August 2019Thumbnail for version as of 12:25, 20 August 2019568 × 311 (28 KB)Guiding lightlarger fonts
12:22, 20 August 2019Thumbnail for version as of 12:22, 20 August 2019568 × 311 (27 KB)Guiding lightclearer labels of shortest and longest wavelength zones
12:35, 19 August 2019Thumbnail for version as of 12:35, 19 August 2019569 × 311 (26 KB)Guiding lightAdded inset for wavelength distribution in pupil
15:32, 31 July 2019Thumbnail for version as of 15:32, 31 July 2019569 × 311 (26 KB)Guiding lightenlarged graph
14:56, 31 July 2019Thumbnail for version as of 14:56, 31 July 2019566 × 309 (20 KB)Guiding lightThe actual spectrum's reflectance is added as dashed curve.
06:28, 20 July 2019Thumbnail for version as of 06:28, 20 July 2019762 × 454 (97 KB)Guiding lightRemove inset
06:23, 20 July 2019Thumbnail for version as of 06:23, 20 July 2019761 × 454 (110 KB)Guiding lightShow individual wavelengths only; effective illumination for 13.55 nm only.
14:46, 19 July 2019Thumbnail for version as of 14:46, 19 July 2019711 × 422 (97 KB)Guiding lightweighted average corrected
20:17, 18 July 2019Thumbnail for version as of 20:17, 18 July 2019746 × 446 (109 KB)Guiding light"weighted average" changed to "weighted sum" the correct term
11:58, 18 July 2019Thumbnail for version as of 11:58, 18 July 2019758 × 452 (110 KB)Guiding lightcorrected weighted average
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