File:Pitch widening below Rayleigh criterion.png

Page contents not supported in other languages.
This is a file from the Wikimedia Commons
From Wikipedia, the free encyclopedia

Pitch_widening_below_Rayleigh_criterion.png(636 × 289 pixels, file size: 25 KB, MIME type: image/png)

Summary

Description
English: The separation between intensity peaks in the image is wider than the actual separation between illuminated point objects, below the Rayleigh criterion.[1] In this case, while 52 nm separation is maintained since it is above the 50 nm Rayleigh criterion, 48 nm and 44 nm separations appear wider in the image. The Rayleigh criterion for peak-to-peak separation comes from the radius for the first minimum of the Airy disk.[2] This distance needs to be doubled for separated edges, e.g. at half maximum intensity, as well as to minimize the neighboring feature's impact beyond the second minimum.
Date
Source Excel
Author Guiding light

Licensing

I, the copyright holder of this work, hereby publish it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.

References

  1. Lithography Resolution Limits: Paired Features
  2. Numerical Aperture and Image Resolution

Captions

Add a one-line explanation of what this file represents

Items portrayed in this file

depicts

29 August 2020

image/png

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current03:42, 29 August 2020Thumbnail for version as of 03:42, 29 August 2020636 × 289 (25 KB)Guiding lightUploading a self-made file using File Upload Wizard
The following pages on the English Wikipedia use this file (pages on other projects are not listed):

Metadata