File:From on-axis to off-axis illumination.png

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English: Compared to on-axis illumination, where the illumination ray is along the optical axis (center of pupil represented by the circle), illumination that is further off-axis tends to reduce the contrast (max-min) but is the only way to resolve the smallest pitch.[1][2][3]
Date
Source Excel and PowerPoint
Author Guiding light

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References

  1. ↑ B. Smith, Proc. SPIE 3334, 142 (1998).
  2. ↑ N. Zeggaoui et al., Proc. SPIE 7823, 78233Y (2010).
  3. ↑ K. Ronse et al., J. Vac. Sci. & Tech. B 12, 589 (1994).

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