File:EUV pupil wavelength dependence.png
No higher resolution available.
EUV_pupil_wavelength_dependence.png (611 × 327 pixels, file size: 85 KB, MIME type: image/png)
 | This is a file from the Wikimedia Commons. Information from its description page there is shown below. Commons is a freely licensed media file repository. You can help. |
Summary
| Description |
English: For different EUV wavelengths, the angular dependence of the reflectance from the EUV mask multilayer is different,[1][2] resulting in effectively different pupils. Source-mask optimization would exclude portions of these pupils,[3] leading to different results for different wavelengths. Both 13.4 nm and 13.5 nm are used in EUV exposure of resists, since they are well within the 2% bandwidth. The angular dependence of reflectance with off-axis central angle results in nonuniform distribution across the pupil.[4] |
| Date | |
| Source |
.svg){kind=small} This diagram was created with Microsoft Excel. |
| Author | Guiding light |
|
This table image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with
{{vector version available|new image name}}.
It is recommended to name the SVG file “EUV pupil wavelength dependence.svg”—then the template Vector version available (or Vva) does not need the new image name parameter. |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: Guiding light at English Wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2019-07-20 22:18:40 | 611 × 327 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
|
This media file is uncategorized.
Please help improve this media file by adding it to one or more categories, so it may be associated with related media files (how?), and so that it can be more easily found.
Please notify the uploader with {{subst:Please link images|File:EUV pupil wavelength dependence.png}} ~~~~ |
- ↑ N Davydova et al., Proc. SPIE 8166, 816624 (2011).
- ↑ R. Chao et al., Measurement and characterization of EUV mask performance at high-NA, EECS Department, Univ. of California, Berkeley Technical Report No. UCB/EECS-2013-56, 5/10/2013, Figure 5.
- ↑ X. Liu et al., Proc. SPIE 9048, 9040Q (2014).
- ↑ J. Ruoff, Proc. SPIE 7823, 78231N (2010).
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:27, 20 August 2019 | | 611 × 327 (85 KB) | Dave louis john | Transferred from en.wikipedia (MTC!) (1.1.0) |
File usage
The following pages on the English Wikipedia use this file (pages on other projects are not listed):
