File:36 nm pitch 2-bar CD delta vs focus.png
No higher resolution available.
36_nm_pitch_2-bar_CD_delta_vs_focus.png (481 × 288 pixels, file size: 8 KB, MIME type: image/png)
 | This is a file from the Wikimedia Commons. Information from its description page there is shown below. Commons is a freely licensed media file repository. You can help. |
Summary
| Description | A 36 nm pitch horizontal two-bar structure exhibits significant CD difference (between upper and lower bar as a function of focus. This has been attributed to the shadowing effect of the EUV illumination. Ref.: V. Philipsen et al., Proc. SPIE vol. 10143, 1014310 (2017). |
| Date | |
| Source | Excel |
| Author | Guiding light |
|
This graph image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with
{{vector version available|new image name}}.
It is recommended to name the SVG file “36 nm pitch 2-bar CD delta vs focus.svg”—then the template Vector version available (or Vva) does not need the new image name parameter. |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: Guiding light at English Wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-06-20 12:47:50 | 481 × 288 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 21:36, 11 May 2018 | | 481 × 288 (8 KB) | Willy1018 | Transferred from en.wikipedia (MTC!) (1.1.0) |
File usage
The following pages on the English Wikipedia use this file (pages on other projects are not listed):
Global file usage
The following other wikis use this file:
- Usage on es.wikipedia.org
- Usage on ru.wikipedia.org
